Gas turbine cannot operate in completely pure environment. Particulate matter in air and impure fuel will form CaO-MgO-Al₂O₃-SiO₂(CMAS) particles in the combustion chamber during service. CMAS deposition on the surface of turbine blade will deteriorate the cooling performance of the film cooling and shorten the service life of gas turbine. In this paper, based on the functional relationship between particle velocity, temperature, viscosity and components and the mechanism of collision, rebound, adhesion and removal with the wall, the mathematical models for the CMAS deposition were established. The effect of conjugate heat transfer performance of film cooling on the temperature distribution of CMAS particles were analyzed. The results show that the flow characteristics of high-temperature main gas flow determine the movement and heat transfer of CMAS particles. The deposition morphology of CMAS on the blade surface is mainly affected by the blowing ratio. Because the counter-rotating vortex pairs (CRVP) of fan-shaped holes are further apart and lower in height, the particle temperature distribution on the coupon with fan-shaped holes is more uniform and the particle cooling effect is better than that of the cylindrical holes, especially at large blowing ratio. The average temperature of particles for fan-shaped holes is about 0.167% lower than that for cylindrical holes when blowing ratio increases to 3. As the inlet temperature increases, the particles show more phase states and a more uniform temperature distribution. The effect of the particle phase evolution on the particle deposition behavior should be considered as a priority when the inlet temperature is greater than 1500 K.