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ISSN Online: 2377-424X

ISBN CD: 1-56700-226-9

ISBN Online: 1-56700-225-0

International Heat Transfer Conference 13
August, 13-18, 2006, Sydney, Australia

DEVELOPMENT OF NANOSCALE THERMAL CONDUCTIVITY IMAGING METHOD USING THERMOELECTRIC SCANNING THERMAL MICROSCOPE PROBE

Get access (open in a dialog) DOI: 10.1615/IHTC13.p8.140
12 pages

Аннотация

In this paper we present the 2ω method, a novel AC mode local thermal property imaging technique with nanoscale spatial resolution. In order to use thermoelectric probe as an active probe that can function both as a heater and a temperature sensor, we developed and demonstrated the 2ω signal measurement technique that can extract thermoelectric signal from a thermocouple junction while electrically heating it simultaneously. We batch-fabricated thermoelectric, whose junction size is about 200 nm with yield higher than 95 %. We experimentally demonstrated that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe being heated with AC current simultaneously. Through the comparison with the thermal property images obtained by other methods, we also showed that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.