Inscrição na biblioteca: Guest

ISSN Online: 2377-424X

ISBN Print: 1-56032-797-9

International Heat Transfer Conference 11
August, 23-28, 1998, Kyongju, Korea

THERMO-MECHANICAL CHARACTERISTICS OF MICRO-CANTILEVER INFRARED DETECTORS

Get access (open in a dialog) DOI: 10.1615/IHTC11.3000
pages 107-112

Resumo

The use of bi-material micro-cantilevers for thermo-mechanical infrared detection has recently been proposed. To maximize detector performance, it is important to find the dependence of the specific detectivity, D*, sensitivity, S, and time constant, τth, on the shape and material properties of the micro-cantilever. Dynamic and steady state thermo-mechanical analysis of one-dimensional cantilevers showed the specific detectivity to be independent of the total cantilever thickness and follows the relation, D* ~ L where L is the cantilever length. For a certain choice of materials, an optimum thickness ratio of the two cantilever materials was found to maximize D*. For the silicon nitride-polymer combination, the maximum value of D* was found to be about 1011 [cm√Hz/W ] at room temperature for a 100 µm-long cantilever. For the range of material properties and geometric shapes considered, the thermo-mechanical frequency response was found to be governed only by the thermal time constant of the cantilever.