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ISSN Online: 2377-424X

International Heat Transfer Conference 12
August, 18-23, 2002, Grenoble, France

Nanoscale Thermal, Electrical and Thermoelectric Measurements by Integrated Scanning Thermal Probe Microscopy

Get access (open in a dialog) DOI: 10.1615/IHTC12.4190
5 pages

Resumo

Recent interest in thermal, electrical and thermoelectric properties of thin films and nano-structures has driven the development of measurement tools. One promising technique integrates sensors into Atomic Force Microscope (AFM) probes to investigate thermal, electrical, and thermoelectric properties on nanometer scales. In the past, such probes have been used to measure the temperature distribution of nanostructures such as carbon nanotubes with 50 nm spatial resolution. In this paper, we will present the design theory involved in fabrication of these integrated scanning thermal probes and results of the probe's performance characterization. These nanoscale measurement tools are being used to study thermal, electrical and thermoelectric properties of thermionic cooler, nanowires, and nanocontacts. The experimental results of these studies will be presented with accompanying theoretical analysis.